تحضير اغشية أوكسيد النحاس الرقيقة ذات التركيب النانوي والمطعمة بالفضة بطريقة بلازما الترذيذ الماكنتروني كمتحسس لبخار الاسيتون

Synthesis of nanostructure CuO thin films doped with Ag by magnetron sputtering plasma as an acetone vapor sensor

Abstract

In this work, (Ag) doped with (CuO) thin films having different concentrations were deposited on (glass and indium tin oxide ITO) as substrates by DC magnetron sputtering methods using copper oxide target under Ar gas 75 W. x-ray diffraction XRD data showed the crystallinity of the synthesized of pure and Ag/CuO nanoparticle thin films. The creation of nanomaterials with high crystallization has been confirmed by these peaks. The creation of nanomaterials with high crystallization has been confirmed by these peaks. The Ag/CuO phase is found in the nanoparticles made with 3%Ag/CuO, 5%Ag/CuO, and 7%Ag/CuO The produced samples’ diffraction peaks reveal a sharp domain (200) peak at roughly 2Ɵ=38.9°. Field Emission Scanning Electron Microscopy FE-SEM photos showed a spherical shape of copper oxide nanoparticles and semi-spherical Ag/CuO nanoparticles. the roughness’s of prepared samples on the films (glass and ITO) decline with the elevating the grain – wise (Rms) for all particles sample, that attitude to large ionic radius of Ag compared with ionic radius of Cu. In addition, the average grain size and roughness decreases when the proportion of silver increases on copper oxide that deposited on glass and ITO.
UV-Visible absorption characteristics were investigated It can be detected from these spectra that the film transparency decreases with the increase with an increase in the distortion rate. the band gap of Ag(3, 5 and 7)/CuO depresses with increasing the Ag % and partial sizes of samples in FE-SEM analysis. This result is normal, which attitude to decrease the internal repulsion between Ag and CuO levels after elevated Ag that leads to increase the particle size. the sensor results for thin films on glass and found the best acetone sensing was obtained with 7%Ag doped CuO NP , because it has a less resistant at 40 min at 272 Ω compared with 5% Ag doped CuO that has a high resistant at 130 min at 461 Ω .